Vacuum Dry Pump for Semiconductor Market Size, Share, Growth, and Industry Analysis, By Types (Roots Type,Screw Type,Scroll Type,Claw Type,Others ), By Applications Covered (Gas,Liquid), Regional Insights and Forecast to 2033

Vacuum Dry Pump for Semiconductor market size

Global Vacuum Dry Pump for Semiconductor Market size was USD 1.52 Billion in 2024 and is projected to reach USD 1.67 Billion in 2025, ultimately expanding to USD 3.58 Billion by 2033. This growth reflects a strong CAGR of 10.0% over the forecast period from 2025 to 2033.

Increasing demand for contamination-free and oil-free vacuum environments in semiconductor fabrication processes is driving the adoption of advanced vacuum dry pump systems globally.In the United States, the Vacuum Dry Pump for Semiconductor Market accounts for approximately 27.3% of the global share in 2025, driven by surging investment in chip manufacturing facilities and technological upgrades in dry pump infrastructure across key semiconductor hubs.

Key Findings

• Market Size: Valued at USD 1.67 Billion in 2025, expected to reach USD 3.58 Billion by 2033, growing at a CAGR of 10.0%.
• Growth Drivers: Over 58% demand from clean vacuum requirements; 41% adoption in sub-7nm node chip manufacturing.
• Trends: 36% increase in multi-stage pump usage; 28% of new dry pumps offer smart predictive maintenance capabilities.
• Key Players: Atlas Copco, Ebara Corporation, Pfeiffer Vacuum GmbH, Kashiyama Industries, ULVAC, Inc
• Regional Insights: Asia-Pacific 44.6%, North America 27.3%, Europe 21.5%, Middle East & Africa 6.6% market share
• Challenges: 29% report maintenance complexity; 22% face lead time delays due to supply chain limitations.
• Industry Impact: 34% fabs upgraded to dry systems; 24% decline in wet pump usage over two years.
• Recent Developments: 32% of new models integrated with sensors; 19% boost in thermal and material resilience.

The Vacuum Dry Pump for Semiconductor market plays a pivotal role in high-tech chip manufacturing by maintaining oil-free, ultra-clean environments essential for advanced process nodes. These pumps are used extensively in etching, deposition, and lithography steps, ensuring zero contamination and consistent vacuum performance. With increasing global demand for high-density integrated circuits and next-generation chipsets, the Vacuum Dry Pump for Semiconductor market is experiencing a rapid surge in deployment across fabrication facilities. The market is also witnessing innovations in energy-efficient and low-maintenance pump designs, which is further enhancing its appeal to major semiconductor manufacturers.

Vacuum Dry Pump for Semiconductor market Trends

The Vacuum Dry Pump for Semiconductor market is undergoing significant transformation driven by advances in semiconductor technology and rising global chip demand. In 2024, over 31% of semiconductor fabs adopted dry pumps integrated with smart diagnostics for real-time monitoring. The Vacuum Dry Pump for Semiconductor market is witnessing a clear shift toward oil-free and low-particle generation models, particularly favored for extreme ultraviolet (EUV) lithography and atomic layer deposition (ALD). Approximately 42% of new fab constructions in Asia are incorporating advanced vacuum systems with energy-saving features. Furthermore, the Vacuum Dry Pump for Semiconductor market has observed a 36% increase in the deployment of multi-stage dry pumps to support complex manufacturing processes. Manufacturers are emphasizing noise reduction and high-temperature tolerance, with nearly 28% of newly launched pumps in 2023 designed with enhanced thermal management. This evolving trend is aligning with sustainability goals, with about 24% of fab operators preferring dry pumps that reduce power consumption by more than 20%. These trends are reshaping the competitive landscape of the Vacuum Dry Pump for Semiconductor market.

Vacuum Dry Pump for Semiconductor market Dynamics

The Vacuum Dry Pump for Semiconductor market is shaped by evolving industry dynamics including rising production of advanced chips, stringent environmental regulations, and growing demand for cleanroom-compatible equipment. The market is propelled by the growing semiconductor foundry expansions across Asia and North America, with more than 40% of capacity additions in 2024 depending on dry vacuum pump systems. The Vacuum Dry Pump for Semiconductor market also benefits from ongoing investment in high-volume manufacturing (HVM) nodes that require high-reliability vacuum systems. Moreover, the demand for sub-5nm node support equipment is increasing, driving demand for high-capacity, contamination-free dry pumps. However, supply chain complexities, high product costs, and the need for periodic maintenance pose operational hurdles for market participants.

OPPORTUNITY

Growth in 3D NAND and logic semiconductor fabrication

The Vacuum Dry Pump for Semiconductor market is poised for expansion due to the increasing investment in 3D NAND and logic chip manufacturing. These applications demand ultra-stable vacuum systems with extended uptime, and over 45% of new facilities dedicated to 3D NAND use advanced dry pump technologies. With demand for storage devices growing by 34% in 2024, chipmakers are scaling up 3D NAND production capacity, thereby increasing demand for Vacuum Dry Pump for Semiconductor market offerings. Furthermore, emerging markets in Southeast Asia are investing in semiconductor manufacturing clusters, presenting strong opportunities for dry pump manufacturers to tap into cost-sensitive but high-volume regions.

DRIVERS

Demand for oil-free vacuum environments in advanced chipmaking processes

The Vacuum Dry Pump for Semiconductor market is being driven by the demand for clean, oil-free vacuum environments, especially in processes like plasma etching and chemical vapor deposition. Around 58% of chip fabrication steps now rely on ultra-clean vacuum systems to prevent particulate contamination. The increased adoption of EUV lithography, used in manufacturing 7nm and smaller nodes, necessitates the use of high-efficiency dry pumps, which has grown by nearly 41% year-over-year. Additionally, the rise in global semiconductor manufacturing capacity, particularly in Taiwan, South Korea, and the U.S., is fueling pump demand. The Vacuum Dry Pump for Semiconductor market is also witnessing a shift toward pumps with IoT monitoring for preventive maintenance.

Market Restraints

"High cost of installation and periodic maintenance"

The Vacuum Dry Pump for Semiconductor market faces restraints due to the high initial cost of pump systems and the periodic maintenance required to sustain optimal performance. On average, advanced dry pump systems cost 35% more than conventional wet systems, and approximately 29% of semiconductor fabs report recurring maintenance challenges. Limited availability of skilled service personnel further adds to downtime and repair costs. Moreover, smaller fab operators find it difficult to afford multiple high-end dry pumps for parallel processes. This cost barrier is particularly evident in emerging economies, where over 23% of manufacturers still prefer low-cost, oil-sealed pumps despite contamination risks, limiting Vacuum Dry Pump for Semiconductor market penetration.

Market Challenges

"Supply chain constraints and long lead times"

One of the key challenges in the Vacuum Dry Pump for Semiconductor market is the supply chain disruption, which affects both the delivery of raw materials and final product lead times. In 2024, over 22% of manufacturers reported delivery delays exceeding 8 weeks due to component shortages. Additionally, rising prices of rare metals and electronic components, which constitute 18% of dry pump construction materials, are increasing manufacturing costs. Moreover, integration with next-gen semiconductor tools often requires custom designs, leading to further delays. These bottlenecks are challenging suppliers in the Vacuum Dry Pump for Semiconductor market to maintain production timelines, impacting customer satisfaction and market scalability.

Segmentation Analysis

The Vacuum Dry Pump for Semiconductor market is segmented by type and application, allowing stakeholders to understand specific adoption trends. On the basis of type, categories include Roots Type, Screw Type, Scroll Type, Claw Type, and Others. Each type serves different stages of the semiconductor fabrication process based on pumping speed, footprint, and contamination tolerance. In terms of application, the market splits into gas-based and liquid-based semiconductor processing, with gas processes dominating due to their usage in dry etching and CVD. The Vacuum Dry Pump for Semiconductor market shows growing preference for modular pump designs that can serve both high-throughput and ultra-clean applications. Each segment is growing based on technological compatibility and cost-effectiveness.

By Type

• Roots Type: Roots-type pumps in the Vacuum Dry Pump for Semiconductor market account for nearly 26% of the overall demand due to their high-speed, high-volume pumping capabilities. These pumps are favored in front-end wafer processing where large vacuum throughput is required.
• Screw Type: Screw-type dry pumps are witnessing a 19% increase in adoption due to their robust design, easy maintenance, and ability to handle aggressive gases. They are commonly used in ion implantation and as backing pumps.
• Scroll Type: Scroll-type pumps hold around 14% of the Vacuum Dry Pump for Semiconductor market due to their oil-free operation and compact size, making them ideal for metrology tools and lab-scale semiconductor devices.
• Claw Type: Claw-type dry pumps have gained popularity in cleanroom operations with a 12% market share. Their strong vacuum performance with minimal vibration makes them suitable for high-precision photolithography.
• Others: Other pump types, including hybrid and multi-stage dry pumps, account for the remaining 29%, driven by demand for customized vacuum performance across varied chip production tools.

By Application

• Gas: In the Vacuum Dry Pump for Semiconductor market, Gas-phase applications dominate with over 68% share due to their crucial role in plasma etching, ALD, and CVD. Gas-based processes require pumps that can handle corrosive gases without oil contamination, making dry pumps essential. These pumps also support clean exhaust for hazardous byproducts.
• Liquid: Liquid-phase applications represent 32% of the Vacuum Dry Pump for Semiconductor market, primarily in cleaning, wet etching, and chemical-mechanical polishing (CMP) stages. While these require less vacuum intensity, contamination control is still essential, leading to increasing adoption of dry vacuum pumps designed with anti-corrosion and moisture-resistant features.

Vacuum Dry Pump for Semiconductor market Regional Outlook

The Vacuum Dry Pump for Semiconductor market showcases strong regional variation based on technological adoption, manufacturing capacity, and government support for semiconductor production. Asia-Pacific leads the global share, supported by vast manufacturing bases and investment incentives. North America follows, driven by chip sovereignty initiatives and high adoption of EUV technologies. Europe reflects steady progress in fab expansions with a focus on energy-efficient dry pumps. The Middle East & Africa are emerging regions, gaining traction through industrial diversification and cleanroom infrastructure growth. Regional dynamics are reshaping the Vacuum Dry Pump for Semiconductor market through targeted investments and partnerships that align with regional industrial goals.

North America

North America holds approximately 27.3% of the global Vacuum Dry Pump for Semiconductor market in 2025, largely due to increased U.S. fab construction and modernization projects. More than 40% of newly established fabs in the region integrate multi-stage dry pumps for etching and deposition processes. Government-backed semiconductor incentive programs have further fueled demand, especially in states like Arizona and Texas. Canada also plays a supporting role through academic collaborations and component supply. Dry pump vendors in the region are focusing on high-throughput pump models with digital monitoring, with 33% of users opting for AI-integrated diagnostic systems. Sustainability goals are further pushing adoption of low-emission pump designs.

Europe

Europe accounts for nearly 21.5% of the Vacuum Dry Pump for Semiconductor market, with leading adoption in Germany, France, and the Netherlands. Around 46% of semiconductor fabs in Europe have replaced conventional pumps with eco-efficient dry vacuum pumps. The region is witnessing heightened demand for pumps compatible with GaN and SiC production. Germany contributes over 35% of the European market, driven by its leadership in industrial automation and electronics. Companies are also investing in local R&D centers, with 28% of new pump technologies in 2024 being developed within European labs. Environmental regulations in the EU further support the shift toward sustainable, oil-free systems.

Asia-Pacific

Asia-Pacific dominates the Vacuum Dry Pump for Semiconductor market with more than 44.6% share in 2025. Countries like China, South Korea, Japan, and Taiwan lead in fab numbers and equipment integration. Over 55% of semiconductor equipment purchases in Asia-Pacific include dry vacuum pumps for advanced wafer processing. China alone contributes 29% of the regional share due to aggressive domestic chip production goals. In South Korea, over 60% of fabs utilize dry pumps optimized for high-temperature processing. Additionally, 31% of new installations in Japan are focused on miniaturized pump systems for AI and mobile chipsets. Rapid technology shifts in Asia-Pacific continue to drive the region’s dominance.

Middle East & Africa

The Middle East & Africa represent approximately 6.6% of the global Vacuum Dry Pump for Semiconductor market. While still an emerging region, there is increasing adoption driven by new tech parks and fab projects in the UAE, Saudi Arabia, and South Africa. Over 18% of industrial equipment investments in the UAE now include vacuum technologies. Regional fab collaborations are also expanding, with 22% growth in semiconductor-related cleanroom infrastructure. The African segment is gradually moving toward advanced electronics production, contributing to rising demand for basic dry vacuum solutions. This region’s potential lies in its untapped markets and international partnerships supporting technological transfer.

LIST OF KEY Vacuum Dry Pump for Semiconductor market COMPANIES PROFILED

Investment Analysis and Opportunities

The Vacuum Dry Pump for Semiconductor market is experiencing investment momentum from both equipment manufacturers and semiconductor fab operators. In 2024, over 39% of capital expenditure in new fabs was allocated toward vacuum systems. Investments are focused on energy-saving technologies, with over 31% of installed systems featuring variable frequency drives to optimize power usage. Emerging markets like Vietnam and India are drawing FDI inflows aimed at establishing semiconductor clusters with advanced dry pump infrastructure. Additionally, pump vendors are investing in digital twin technology to simulate vacuum environments, with 16% of OEMs integrating such software into their offerings. Opportunities also exist in transitioning from legacy wet systems to smart dry vacuum pumps in older fabs, which currently comprise 28% of operating semiconductor facilities. Furthermore, modular and stackable dry pump designs are seeing growing demand among small-scale, application-specific fabs, contributing to broader market accessibility and equipment replacement cycles.

NEW PRODUCTS Development

In 2023 and 2024, the Vacuum Dry Pump for Semiconductor market saw a surge in new product launches, with 19% of models featuring improved thermal resistance and compact designs. Atlas Copco launched a next-gen dry pump with 28% higher efficiency under high-load conditions. Pfeiffer Vacuum introduced a smart-connected dry pump integrated with predictive maintenance algorithms, reducing downtime by nearly 35%. ULVAC released a noise-reduced variant tailored for ultra-cleanroom compatibility, which lowered operational noise levels by 23%. Taiko Kikai Industries unveiled a miniaturized pump capable of operating in confined fab environments without compromising on throughput. Meanwhile, Kashiyama Industries launched a corrosion-resistant dry pump designed specifically for ALD and plasma etching processes, with 25% better material compatibility. New developments focus on sustainable operation, performance optimization, and process versatility. The integration of smart sensors and self-diagnostic modules is also becoming standard across new product lines, accounting for 32% of 2024’s total product innovations in the Vacuum Dry Pump for Semiconductor market.

Recent Developments

• Atlas Copco expanded its production line by 17% to meet rising demand for high-throughput dry pumps in 2023.
• ULVAC collaborated with a major fab in Taiwan, delivering dry pump systems optimized for 3nm node support.
• Pfeiffer Vacuum established a new R&D center in Germany, focusing on AI-enabled pump diagnostics.
• Busch Vacuum released a modular pump series with energy efficiency improvements up to 22% in Q1 2024.
• Taiko Kikai Industries signed a supply agreement with an Indian fab project, enhancing regional pump accessibility by 19%.

REPORT COVERAGE

The report on the Vacuum Dry Pump for Semiconductor market offers a comprehensive overview of market dynamics, including growth drivers, challenges, opportunities, and region-specific insights. It provides deep analysis on the competitive landscape, covering the latest advancements, product launches, and strategic alliances of key players. The report segments the market based on type (Roots, Screw, Scroll, Claw, Others) and application (Gas, Liquid), analyzing adoption trends across each. Additionally, it covers detailed insights into regional markets including North America, Europe, Asia-Pacific, and the Middle East & Africa. The report includes historical trends and future forecasts, ensuring data-driven insights for strategic decision-making. Market shares, product benchmarking, and regional demand patterns are also covered. The study highlights how demand for oil-free, energy-efficient, and maintenance-friendly vacuum systems is shaping industry evolution. Moreover, the report discusses regulatory, environmental, and technological factors influencing purchase behavior, with an emphasis on product innovation and digital integration.